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dc.contributor.author
Taschini, Stefano
dc.contributor.author
Baltes, Henry
dc.contributor.supervisor
Baltes, Heinrich P.
dc.contributor.supervisor
Korvink, Jan Gerrit
dc.date.accessioned
2017-06-13T02:59:40Z
dc.date.available
2017-06-13T02:59:40Z
dc.date.issued
2000
dc.identifier.isbn
3-89649-633-6
dc.identifier.uri
http://hdl.handle.net/20.500.11850/144977
dc.identifier.doi
10.3929/ethz-a-004089228
dc.language.iso
en
dc.publisher
Hartung-Gorre
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK)
dc.subject
MIKROSYSTEMTECHNIK, MST
dc.subject
MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING)
dc.subject
MICRO SYSTEM TECHNOLOGIES, MST
dc.title
Modeling of slender structures in microsystems
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
ethz.size
100 S.
ethz.code.ddc
6 - Technology, medicine and applied sciences::621.3 - Electric engineering
ethz.notes
Diss., Technische Wissenschaften ETH Zürich, Nr.13764, 2001.
ethz.identifier.diss
13764
ethz.identifier.nebis
004089228
ethz.publication.place
Konstanz
ethz.publication.status
published
ethz.leitzahl
03263 - Baltes, Henry
ethz.date.deposited
2017-06-13T03:00:58Z
ethz.source
ECOL
ethz.identifier.importid
imp59366a366f8b522462
ethz.ecolpid
eth:23864
ethz.eth
yes
ethz.availability
Closed access
ethz.rosetta.installDate
2017-07-13T04:04:36Z
ethz.rosetta.lastUpdated
2018-11-04T04:59:31Z
ethz.rosetta.versionExported
true
ethz.COinS
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