Zur Kurzanzeige

dc.contributor.author
Graf, Markus
dc.contributor.supervisor
Baltes, Heinrich P.
dc.contributor.supervisor
De Rooij, Nicolaas F.
dc.date.accessioned
2019-08-06T10:53:21Z
dc.date.available
2017-06-13T04:43:19Z
dc.date.available
2019-08-06T10:53:21Z
dc.date.issued
2004
dc.identifier.uri
http://hdl.handle.net/20.500.11850/148271
dc.identifier.doi
10.3929/ethz-a-004830192
dc.format
application/pdf
dc.language.iso
en
en_US
dc.publisher
Physical Electronics Laboratory
en_US
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
KOMPLEMENTÄRE METALLOXID-HALBLEITERSCHALTUNGEN, CMOS (MIKROELEKTRONIK)
en_US
dc.subject
METAL OXIDE SEMICONDUCTOR-TRANSISTOREN, MOS (ELEKTRONIK)
en_US
dc.subject
MIKROBEARBEITUNG (SPANENDE UMFORMUNG)
en_US
dc.subject
COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS, CMOS (MICROELECTRONICS)
en_US
dc.subject
METAL OXIDE SEMICONDUCTOR TRANSISTORS, MOS (ELECTRONICS)
en_US
dc.subject
MICROMACHINING (MACHINING)
en_US
dc.title
Microhotplate-based chemical sensor systems in CMOS technology
en_US
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
ethz.size
148 S.
en_US
ethz.code.ddc
DDC - DDC::6 - Technology, medicine and applied sciences::621.3 - Electric engineering
en_US
ethz.code.ddc
DDC - DDC::6 - Technology, medicine and applied sciences::621.3 - Electric engineering
en_US
ethz.notes
Diss., Eidgenössische Technische Hochschule ETH Zürich, Nr. 15438, 2004.
en_US
ethz.identifier.diss
15438
en_US
ethz.identifier.nebis
004830192
ethz.publication.place
Zürich
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
03263 - Baltes, Henry
en_US
ethz.date.deposited
2017-06-13T04:45:06Z
ethz.source
ECOL
ethz.identifier.importid
imp59366a805b20d37708
ethz.ecolpid
eth:27421
ethz.eth
yes
en_US
ethz.availability
Closed access
en_US
ethz.rosetta.installDate
2017-07-13T10:14:04Z
ethz.rosetta.lastUpdated
2021-02-15T05:28:51Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Microhotplate-based%20chemical%20sensor%20systems%20in%20CMOS%20technology&rft.date=2004&rft.au=Graf,%20Markus&rft.genre=unknown&rft.btitle=Microhotplate-based%20chemical%20sensor%20systems%20in%20CMOS%20technology
 Printexemplar via ETH-Bibliothek suchen

Dateien zu diesem Eintrag

Thumbnail
Thumbnail

Publikationstyp

Zur Kurzanzeige