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dc.contributor.author
Volden, Tormod
dc.contributor.author
Baltes, Henry
dc.contributor.supervisor
Baltes, Heinrich P.
dc.contributor.supervisor
Brand, Oliver
dc.date.accessioned
2017-06-13T04:58:41Z
dc.date.available
2017-06-13T04:58:41Z
dc.date.issued
2005
dc.identifier.uri
http://hdl.handle.net/20.500.11850/148683
dc.identifier.doi
10.3929/ethz-a-004992264
dc.language.iso
en
dc.publisher
Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zürich
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
KOMPLEMENTÄRE METALLOXID-HALBLEITERSCHALTUNGEN, CMOS (MIKROELEKTRONIK)
dc.subject
RASTERKRAFTMIKROSKOPE, RKM + RASTERKRAFTMIKROSKOPIE
dc.subject
BIOSENSOREN (BIOTECHNOLOGIE)
dc.subject
COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS, CMOS (MICROELECTRONICS)
dc.subject
ATOMIC FORCE MICROSCOPES, AFM + ATOMIC FORCE MICROSCOPY
dc.subject
BIOSENSORS (BIOTECHNOLOGY)
dc.title
CMOS-integrated cantilevers for biosensing and probe microscopy
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
ethz.size
124 S.
ethz.code.ddc
6 - Technology, medicine and applied sciences::621.3 - Electric engineering
ethz.code.ddc
6 - Technology, medicine and applied sciences::621.3 - Electric engineering
ethz.code.ddc
5 - Science::570 - Life sciences
ethz.notes
Diss., Naturwissenschaften, Eidgenössische Technische Hochschule ETH Zürich, Nr. 15984, 2005.
ethz.identifier.diss
15984
ethz.identifier.nebis
004992264
ethz.publication.place
Zürich, ETH-Hönggerberg, HTP-H6
ethz.publication.status
published
ethz.leitzahl
03263 - Baltes, Henry
ethz.date.deposited
2017-06-13T05:00:03Z
ethz.source
ECOL
ethz.identifier.importid
imp59366a8ae84dc92625
ethz.ecolpid
eth:27928
ethz.eth
yes
ethz.availability
Open access
ethz.rosetta.installDate
2017-07-13T10:04:19Z
ethz.rosetta.lastUpdated
2017-11-01T04:19:18Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=CMOS-integrated%20cantilevers%20for%20biosensing%20and%20probe%20microscopy&rft.date=2005&rft.au=Volden,%20Tormod&Baltes,%20Henry&rft.genre=unknown&rft.btitle=CMOS-integrated%20cantilevers%20for%20biosensing%20and%20probe%20microscopy
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