Modeling and Simulation

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Author
Lorenz, J.
Aemmer, D.
Sahli, B.
Aoki, N.
Asada, S.
Axelrad, V.
Bakshi, V.
Bär, E.
Benvenuti, A.
Bork, I.
Demmerle, W.
Erdmann, A.
Fiori, V.
Gafiteanu, R.
Gull, R.
Hayashi, H.
Heringa, A.
Huizing, H.
Izumi, N.
Jaouen, H.
Keersgieter, A. de
Kersch, A.
Kimura, M.
Knaipp, W.
Kunikiyo, T.
LeCarval, G.
Langer, E.
Lerch, W.
Lu, T.C.
Mason, S.
Miura-Mattausch, M.
Molzer, W.
Mouli, C.
Nakamura, M.
Pfäffli, P.
Pichler, P.
Ogata, S.
Sano, N.
Satoh, S.
Schellenberg, F.
Stokbro, K.
Trybula, W.
Wada, T.
Yeh, C.S.
Zechner, C.
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Date
2008
Type
    Book Chapter
Publication status
published
External links
Search print copy at ETH Library
Book title
2007 International Technology Roadmap for Semiconductors (ITRS)
Publisher
International Technology Roadmap for Semiconductors
Organisational unit
03228 - Fichtner, Wolfgang
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