CMOS-based resonant cantilever systems for chemical and biological sensing applications

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Author
Vančura, Cyril
Date
2006
Type
  • Doctoral Thesis
Rights / license
In Copyright - Non-Commercial Use Permitted
Permanent link
https://doi.org/10.3929/ethz-a-005129837
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Contributors
Supervisor: Hierlemann, Andreas
Supervisor: Josse, Fabien
Publisher
Physical Electronics Laboratory
Subject
KOMPLEMENTÄRE METALLOXID-HALBLEITERSCHALTUNGEN, CMOS (MIKROELEKTRONIK); SENSOREN + DETEKTOREN (ANALYTISCHE CHEMIE); BIOSENSOREN (BIOTECHNOLOGIE); COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS, CMOS (MICROELECTRONICS); SENSORS + DETECTORS (ANALYTICAL CHEMISTRY); BIOSENSORS (BIOTECHNOLOGY)
Organisational unit
03684 - Hierlemann, Andreas
Notes
Diss., Technische Wissenschaften, Eidgenössische Technische Hochschule ETH Zürich, Nr. 16404, 2006.
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