Numerical approaches to 3D magnetic MEMS

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Author
Nagy, Zoltán
Date
2006
Type
    Master Thesis
Rights / license
In Copyright - Non-Commercial Use Permitted
Permanent link
https://doi.org/10.3929/ethz-a-005280339
Publication status
published
Publisher
ETH, Eidgenössische Technische Hochschule Zürich, Institute of Robotics and Intelligent Systems
Subject
MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); MAGNETISCHE WERKSTOFFE; MAGNETISMUS (ELEKTROMAGNETISMUS); MAXWELLSCHE THEORIE (ELEKTRODYNAMIK); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); MAGNETIC MATERIALS; MAGNETISM (ELECTROMAGNETISM); MAXWELL'S THEORY (ELECTRODYNAMICS)
Organisational unit
02620 - Inst. f. Robotik u. Intelligente Systeme / Inst. Robotics and Intelligent Systems
Notes
Diplomarbeit, Eidgenössische Technische Hochschule Zürich, 2006.
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