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dc.contributor.author
Bachmann, Daniel
dc.contributor.supervisor
Dual, Jürg
dc.contributor.supervisor
Hierold, Christofer
dc.date.accessioned
2017-06-13T05:56:48Z
dc.date.available
2017-06-13T05:56:48Z
dc.date.issued
2007
dc.identifier.isbn
978-3-89959-618-2
dc.identifier.uri
http://hdl.handle.net/20.500.11850/150012
dc.identifier.doi
10.3929/ethz-a-005417046
dc.language.iso
en
dc.publisher
Der Andere Verlag
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK)
dc.subject
ELEKTROSTATIK/TECHNISCHE ANWENDUNG (ELEKTROTECHNIK)
dc.subject
LAGER, LAGERSCHALEN (MASCHINENELEMENTE)
dc.subject
GYROSKOPISCHE MESSMETHODEN (PHYSIK)
dc.subject
DREHZAHLMESSUNG (MECHANIK)
dc.subject
MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING)
dc.subject
ELECTROSTATICS/TECHNICAL APPLICATIONS (ELECTRICAL ENGINEERING)
dc.subject
BEARINGS, BUSHINGS (MACHINE COMPONENTS)
dc.subject
GYROSCOPIC MEASURING METHODS (PHYSICS)
dc.subject
TACHOMETER (MECHANICS)
dc.title
Multicompliant MEMS for measurement of adhesion energies and pull-off forces in an electrostatic bearing
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
ethz.journal.title
Scientific reports on micro and nanosystems
ethz.journal.volume
03
ethz.size
1 Band
ethz.code.ddc
6 - Technology, medicine and applied sciences::620 - Engineering & allied operations
ethz.code.ddc
6 - Technology, medicine and applied sciences::621.3 - Electric engineering
ethz.notes
Diss., Technische Wissenschaften, Eidgenössische Technische Hochschule ETH Zürich, Nr. 17154, 2007.
ethz.identifier.diss
17154
ethz.identifier.nebis
005417046
ethz.publication.place
Tönning
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.date.deposited
2017-06-13T05:58:30Z
ethz.source
ECOL
ethz.identifier.importid
imp59366ab1d1fa070370
ethz.ecolpid
eth:29751
ethz.eth
yes
ethz.availability
Open access
ethz.rosetta.installDate
2017-07-26T15:31:19Z
ethz.rosetta.lastUpdated
2018-11-04T15:25:35Z
ethz.rosetta.versionExported
true
ethz.COinS
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