Capacitive micro force sensing for biological and biomedical applications
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Date
2008Type
- Doctoral Thesis
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Permanent link
https://doi.org/10.3929/ethz-a-005762786Publication status
publishedExternal links
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Publisher
ETH ZurichSubject
MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); KRAFTMESSUNG (MECHANIK); MIKROSYSTEMTECHNIK, MST; MIKROROBOTIK; MESSTECHNISCHE SONDEN, SENSOREN, DETEKTOREN (PHYSIK); MIKROGREIFER (ROBOTIK); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); DYNAMOMETRIC INDICATORS (MECHANICS); MICRO SYSTEM TECHNOLOGIES, MST; MICROROBOTICS; MEASURING DEVICES, SENSORS, DETECTORS (PHYSICS); MICROGRIPPERS (ROBOTICS)Organisational unit
03627 - Nelson, Bradley J. / Nelson, Bradley J.
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