Capacitive micro force sensing for biological and biomedical applications
dc.contributor.author
Beyeler, Felix M.
dc.contributor.supervisor
Nelson, Bradley J.
dc.contributor.supervisor
Hierold, Christofer
dc.date.accessioned
2017-10-27T13:33:04Z
dc.date.available
2017-06-13T08:00:07Z
dc.date.available
2017-10-27T13:33:04Z
dc.date.issued
2008
dc.identifier.uri
http://hdl.handle.net/20.500.11850/150996
dc.identifier.doi
10.3929/ethz-a-005762786
dc.format
application/pdf
dc.language.iso
en
en_US
dc.publisher
ETH Zurich
en_US
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK)
en_US
dc.subject
KRAFTMESSUNG (MECHANIK)
en_US
dc.subject
MIKROSYSTEMTECHNIK, MST
en_US
dc.subject
MIKROROBOTIK
en_US
dc.subject
MESSTECHNISCHE SONDEN, SENSOREN, DETEKTOREN (PHYSIK)
en_US
dc.subject
MIKROGREIFER (ROBOTIK)
en_US
dc.subject
MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING)
en_US
dc.subject
DYNAMOMETRIC INDICATORS (MECHANICS)
en_US
dc.subject
MICRO SYSTEM TECHNOLOGIES, MST
en_US
dc.subject
MICROROBOTICS
en_US
dc.subject
MEASURING DEVICES, SENSORS, DETECTORS (PHYSICS)
en_US
dc.subject
MICROGRIPPERS (ROBOTICS)
en_US
dc.title
Capacitive micro force sensing for biological and biomedical applications
en_US
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
ethz.size
1 Band
en_US
ethz.code.ddc
DDC - DDC::6 - Technology, medicine and applied sciences::621.3 - Electric engineering
en_US
ethz.code.ddc
DDC - DDC::6 - Technology, medicine and applied sciences::610 - Medical sciences, medicine
en_US
ethz.identifier.diss
18100
en_US
ethz.publication.place
Zurich
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02620 - Inst. f. Robotik u. Intelligente Systeme / Inst. Robotics and Intelligent Systems::03627 - Nelson, Bradley J. / Nelson, Bradley J.
en_US
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02620 - Inst. f. Robotik u. Intelligente Systeme / Inst. Robotics and Intelligent Systems::03627 - Nelson, Bradley J. / Nelson, Bradley J.
en_US
ethz.date.deposited
2017-06-13T08:10:39Z
ethz.source
ECOL
ethz.identifier.importid
imp59366ace8a29b92924
ethz.ecolpid
eth:41459
ethz.eth
yes
en_US
ethz.availability
ETHZ users
en_US
ethz.rosetta.installDate
2017-07-13T17:36:40Z
ethz.rosetta.lastUpdated
2020-02-15T08:31:14Z
ethz.rosetta.versionExported
true
ethz.COinS
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Doctoral Thesis [30528]