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dc.contributor.author
Taprogge, Jens Ludwig Manfred
dc.contributor.supervisor
Hierold, Christofer
dc.contributor.supervisor
Nelson, Bradley J.
dc.date.accessioned
2017-06-13T20:32:49Z
dc.date.available
2017-06-13T20:32:49Z
dc.date.issued
2013
dc.identifier.uri
http://hdl.handle.net/20.500.11850/154151
dc.identifier.doi
10.3929/ethz-a-010000270
dc.language.iso
en
dc.publisher
ETH
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
FERTIGUNG IN DER ELEKTROTECHNIK, ELEKTRONIK, MIKRO-, NANOELEKTRONIK
dc.subject
MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK)
dc.subject
PRODUCTION IN ELECTRICAL ENGINEERING, ELECTRONICS, MICRO-, NANOELECTRONICS
dc.subject
MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING)
dc.title
A self-alignment strategy for parallel C4 MEMS packaging
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
dc.date.published
2013
ethz.size
1 Band
ethz.code.ddc
6 - Technology, medicine and applied sciences::621.3 - Electric engineering
ethz.notes
Diss., Eidgenössische Technische Hochschule ETH Zürich, Nr. 21030, 2013.
ethz.identifier.diss
21030
ethz.identifier.nebis
010000270
ethz.publication.place
Zürich
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02620 - Inst. f. Robotik u. Intelligente Systeme / Inst. Robotics and Intelligent Systems::03627 - Nelson, Bradley J. / Nelson, Bradley J.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02620 - Inst. f. Robotik u. Intelligente Systeme / Inst. Robotics and Intelligent Systems::03627 - Nelson, Bradley J. / Nelson, Bradley J.
ethz.date.deposited
2017-06-13T20:40:12Z
ethz.source
ECOL
ethz.identifier.importid
imp59366b489e85973207
ethz.ecolpid
eth:7531
ethz.eth
yes
ethz.availability
Open access
ethz.rosetta.installDate
2017-07-19T05:41:34Z
ethz.rosetta.lastUpdated
2019-02-02T09:36:21Z
ethz.rosetta.versionExported
true
ethz.COinS
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