Plasma Enhanced Chemical Vapor Deposition on Particulate Solid-State Materials for Improved Powder Processing

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Author
Sonnenfeld, Axel
Roth, Christian
Dimitrova, Zorica
Spillmann, Adrian
Rudolf von Rohr, Philipp
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Date
2009
Type
  • Conference Paper
Publication status
published
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Journal / series
Plasma Processes and Polymers
Volume
6(S1)
Pages / Article No.
S860 - S863
Publisher
Wiley
Event
PSE Conference 2008, Garmisch-Partenkirchen, Germany, September 15-19, 2008
Subject
hexamethyldisiloxane (HMDSO); particles; plasma enhanced chemical vapor deposition (PECVD); powder compressibility; powder flowability
Organisational unit
03348 - Rudolf von Rohr, Philipp / Rudolf von Rohr, Philipp  
Notes
Received 14 September 2008, Accepted 22 February 2009.
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Citations
Cited 9 times in Web of Science
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