Plasma Enhanced Chemical Vapor Deposition on Particulate Solid-State Materials for Improved Powder Processing
Publication status
publishedJournal / series
Plasma processes and polymersVolume
Pages
Publisher
WileyEvent
Subject
hexamethyldisiloxane (HMDSO); particles; plasma enhanced chemical vapor deposition (PECVD); powder compressibility; powder flowabilityOrganisational unit
03348 - Rudolf von Rohr, Philipp
Notes
Received 14 September 2008, Accepted 22 February 2009.More
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