Plasma Enhanced Chemical Vapor Deposition on Particulate Solid-State Materials for Improved Powder Processing
Metadata only
Date
2009Type
- Conference Paper
Publication status
publishedExternal links
Journal / series
Plasma Processes and PolymersVolume
Pages / Article No.
Publisher
WileyEvent
Subject
hexamethyldisiloxane (HMDSO); particles; plasma enhanced chemical vapor deposition (PECVD); powder compressibility; powder flowabilityOrganisational unit
03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
Notes
Received 14 September 2008, Accepted 22 February 2009.More
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