Three-axis micro-force sensor with sub-micro-Newton measurement uncertainty and tunable force range
Nelson, Bradley J.
- Journal Article
Journal / seriesJournal of Micromechanics and Microengineering
Organisational unit03627 - Nelson, Bradley J.
NotesReceived 18 September 2009, In final form 26 November 2009, Published 18 December 2009.
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