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dc.contributor.author
Esposito, Aniello
dc.contributor.author
Ciappa, Mauro
dc.contributor.author
Fichtner, Wolfgang
dc.date.accessioned
2017-06-14T18:36:41Z
dc.date.available
2017-06-14T18:36:41Z
dc.date.issued
2011
dc.identifier.issn
0026-2714
dc.identifier.issn
1872-941X
dc.identifier.other
10.1016/j.microrel.2011.07.015
dc.identifier.uri
http://hdl.handle.net/20.500.11850/160079
dc.language.iso
en
dc.publisher
Elsevier
dc.title
Synthesis of scanning electron microscopy images by high performance computing for the metrology of advanced CMOS processes
dc.type
Journal Article
ethz.journal.title
Microelectronics Reliability
ethz.journal.volume
51
ethz.journal.issue
9-11
ethz.journal.abbreviated
Microelectron. reliab.
ethz.pages.start
1673
ethz.pages.end
1678
ethz.notes
Received 07 June 2011, Accepted 05 July 2011, Available online 09 August 2011.
ethz.identifier.wos
ethz.identifier.nebis
001933457
ethz.publication.place
Kidlington, Oxford
ethz.publication.status
published
ethz.date.deposited
2017-06-14T18:40:44Z
ethz.source
ECIT
ethz.identifier.importid
imp59364e735bd8b61548
ethz.ecitpid
pub:65042
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-20T15:43:08Z
ethz.rosetta.lastUpdated
2017-12-22T01:04:14Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
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