CMOS monolithic atomic force microscope - Research Collection

Metadata only

Autor(in)

Datum

2004

Typ

Conference Paper

Zitate

5 Zitate in Web of Science

ETH Bibliographie

yes

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Publikationsstatus

published

Externe Links

https://doi.org/10.1109/VLSIC.2004.1346597

Buchtitel

Digest of technical papers / 2004 Symposium on VLSI Circuits, June 17-19, 2004, Honolulu

Seiten / Artikelnummer

306 - 309

Verlag

IEEE Service Center

Konferenz

Symposium on VLSI Circuits, Honolulu, June 17-19, 2004

Thema

CMOS; MEMS; Atomic force microscopy; Cantilever array; Parallel scanning and PID control

Organisationseinheit

03263 - Baltes, Henry
03684 - Hierlemann, Andreas / Hierlemann, Andreas

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Zitate

5 Zitate in Web of Science

ETH Bibliographie

yes

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