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dc.contributor.author
Barrettino, D.
dc.contributor.author
Hafizovic, S.
dc.contributor.author
Volden, T.
dc.contributor.author
Sedivy, Jan
dc.contributor.author
Kirstein K.
dc.contributor.author
Hierlemann, A.
dc.contributor.author
Baltes, H.
dc.date.accessioned
2017-06-14T18:55:38Z
dc.date.available
2017-06-14T18:55:38Z
dc.date.issued
2004
dc.identifier.isbn
0-7803-8287-0
dc.identifier.other
10.1109/VLSIC.2004.1346597
dc.identifier.uri
http://hdl.handle.net/20.500.11850/160218
dc.language.iso
en
dc.publisher
IEEE Service Center
dc.subject
CMOS
dc.subject
MEMS
dc.subject
Atomic force microscopy
dc.subject
Cantilever array
dc.subject
Parallel scanning and PID control
dc.title
CMOS monolithic atomic force microscope
dc.type
Conference Paper
ethz.book.title
Digest of technical papers / 2004 Symposium on VLSI Circuits, June 17-19, 2004, Honolulu
ethz.pages.start
306
ethz.pages.end
309
ethz.event
Symposium on VLSI Circuits
ethz.event.location
Honolulu
ethz.event.date
June 17-19, 2004
ethz.identifier.wos
ethz.identifier.nebis
004799804
ethz.publication.place
Piscataway, NJ
ethz.publication.status
published
ethz.leitzahl
03263 - Baltes, Henry
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
ethz.leitzahl.certified
03263 - Baltes, Henry
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
ethz.date.deposited
2017-06-14T19:05:22Z
ethz.source
ECIT
ethz.identifier.importid
imp59364e760ad1b34243
ethz.ecitpid
pub:65198
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-14T20:37:26Z
ethz.rosetta.lastUpdated
2020-02-15T05:20:16Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
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