Analysis of fitness functions for electron-beam lithography simulation and evolutionary optimization - Research Collection

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Author

Robin, Franck

Moreno, Esteban

Date

2004-10

Type

Journal Article

Citations

Cited 0 times in Web of Science

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Publication status

published

External links

https://doi.org/10.1109/TEVC.2004.834198

Journal / series

IEEE Transactions on Evolutionary Computation

Volume

8(5)

Pages / Article No.

506 - 511

Publisher

IEEE

Subject

Electron-beam lithography (EBL); Genetic algorithm (GA); Optimization; Simulation

Notes

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Citations

Cited 0 times in Web of Science

ETH Bibliography

yes

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