Analysis of fitness functions for electron-beam lithography simulation and evolutionary optimization
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Author
Robin, Franck
Moreno, Esteban
Date
2004-10Type
- Journal Article
ETH Bibliography
yes
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Publication status
publishedJournal / series
IEEE Transactions on Evolutionary ComputationVolume
Pages / Article No.
Publisher
IEEESubject
Electron-beam lithography (EBL); Genetic algorithm (GA); Optimization; SimulationNotes
.More
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ETH Bibliography
yes
Altmetrics