Analysis of fitness functions for electron-beam lithography simulation and evolutionary optimization

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Author
Robin, Franck
Moreno, Esteban
Date
2004-10
Type
    Journal Article
Publication status
published
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Journal / series
IEEE Transactions on Evolutionary Computation
Volume
8(5)
Pages / Article No.
506 - 511
Publisher
IEEE
Subject
Electron-beam lithography (EBL); Genetic algorithm (GA); Optimization; Simulation
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