High mobility SiGe heterostructures fabricated by low-energy plasma-enhanced chemical vapor deposition - Research Collection

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Author

Date

2004-10

Type

Conference Paper

Citations

Cited 23 times in Web of Science

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1016/j.mec.2004.07.029

Journal / series

Microelectronic Engineering

Volume

76(1-4)

Pages / Article No.

279 - 284

Publisher

Elsevier

Event

European Workshop on Materials for Advanced Metallization (MAM2004), Brussels, Belgium, March 07-10, 2004

Subject

Silicon germanium (SiGe); Virtual substrate; Relaxed buffer; MODFET

Organisational unit

03569 - Batlogg, Bertram (emeritus)

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Citations

Cited 23 times in Web of Science

ETH Bibliography

yes

Altmetrics