High mobility SiGe heterostructures fabricated by low-energy plasma-enhanced chemical vapor deposition

Metadata only

Autor(in)

Datum

2004-10

Typ

Conference Paper

ETH Bibliographie

yes

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Publikationsstatus

published

Externe Links

Zeitschrift / Serie

Microelectronic Engineering

Band

76(1-4)

Seiten / Artikelnummer

279 - 284

Verlag

Elsevier

Konferenz

European Workshop on Materials for Advanced Metallization (MAM2004), Brussels, Belgium, March 07-10, 2004

Thema

Silicon germanium (SiGe); Virtual substrate; Relaxed buffer; MODFET

Organisationseinheit

03569 - Batlogg, Bertram (emeritus)

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ETH Bibliographie

yes

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Research Collection