Depth profile studies of ZrTiN coatings by laser ablation inductively coupled plasma mass spectrometry
- Conference Paper
Journal / seriesAnalytical and Bioanalytical Chemistry
Pages / Article No.
SubjectLaser ablation; Inductively coupled plasma mass spectrometry; Excimer laser; Beam
Organisational unit03512 - Günther, Detlef
NotesReceived 8 March 2004, Revised 21 May 2004, Accepted 26 May 2004, Published online 30 July 2004.
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