Show simple item record

dc.contributor.author
Zimin, S.P.
dc.contributor.author
Gorlachev, E.S.
dc.contributor.author
Amirov, I.I.
dc.contributor.author
Zogg, H.
dc.contributor.author
Abramof, E.
dc.contributor.author
Rappl, P.H.O.
dc.date.accessioned
2017-06-14T19:27:55Z
dc.date.available
2017-06-14T19:27:55Z
dc.date.issued
2011
dc.identifier.issn
0268-1242
dc.identifier.issn
1361-6641
dc.identifier.other
10.1088/0268-1242/26/10/105003
dc.identifier.uri
http://hdl.handle.net/20.500.11850/160498
dc.language.iso
en
dc.publisher
The Institute of Physics
dc.title
Sputtering rates of lead chalcogenide-based ternary solid solutions during inductively coupled argon plasma treatment
dc.type
Journal Article
ethz.journal.title
Semiconductor Science and Technology
ethz.journal.volume
26
ethz.journal.issue
10
ethz.journal.abbreviated
Semicond. sci. technol.
ethz.pages.start
ARTN 105003
ethz.size
5 p.
ethz.notes
Received 26 June 2011, In final form 01 August 2011, Published 30 August 2011.
ethz.identifier.wos
ethz.identifier.nebis
000034381
ethz.publication.place
London
ethz.publication.status
published
ethz.date.deposited
2017-06-14T19:28:14Z
ethz.source
ECIT
ethz.identifier.importid
imp59364e7b21cfc67658
ethz.ecitpid
pub:65589
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-14T13:45:08Z
ethz.rosetta.lastUpdated
2017-07-14T13:45:08Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Sputtering%20rates%20of%20lead%20chalcogenide-based%20ternary%20solid%20solutions%20during%20inductively%20coupled%20argon%20plasma%20treatment&rft.jtitle=Semiconductor%20Science%20and%20Technology&rft.date=2011&rft.volume=26&rft.issue=10&rft.spage=ARTN%20105003&rft.issn=0268-1242&1361-6641&rft.au=Zimin,%20S.P.&Gorlachev,%20E.S.&Amirov,%20I.I.&Zogg,%20H.&Abramof,%20E.&rft.genre=article&
 Search via SFX

Files in this item

FilesSizeFormatOpen in viewer

There are no files associated with this item.

Publication type

Show simple item record