Measuring stresses in thin metal films by means of Raman microscopy using silicon as a strain gage material
Yüksek, Müge D.
- Journal Article
Journal / seriesJournal of Raman spectroscopy
Pages / Article No.
SubjectRaman microscopy; grain growth; thin film; silicon; thermal stresses
NotesReceived 3 February 2009, Accepted 28 March 2009, Published Online 26 May 2009.
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