From micro- to nanosystems - Research Collection

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Author

Hierold, Christofer

Date

2004-09

Type

Journal Article

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1088/0960-1317/14/9/001

Journal / series

Journal of Micromechanics and Microengineering

Volume

14(9)

Pages / Article No.

S1 - S11

Publisher

IOP Publishing

Notes

Received 3 Februar 2004.

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ETH Bibliography

yes

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