New concept of a 3D-probing system for micro-components

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Author
Liebrich, T.
Knapp, W.
Date
2010
Type
  • Conference Paper
Publication status
published
External links
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Journal / series
CIRP Annals
Volume
59(1)
Pages
513 - 516
Publisher
Elsevier
Event
60th General Assembly of CIRP, Pisa, Italy, August 22-28, 2010
Subject
Metrology; Sensor; Interferometry
Notes
Published online 3 April 2010.
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Citations
Cited 13 times in Web of Science
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