Monte Carlo simulation of emission site, angular and energy distributions of secondary electrons in silicon at low beam energies

Thumbnail
Metadata only
Author
Ciappa, Mauro
Ilguensatiroglu, Emre
Illarionov, Alexey Yu
Date
2012
Type
    Other Conference Item
Publication status
published
External links
Journal / series
Microelectronics Reliability
Volume
23
Pages / Article No.
2139 - 2143
Event
23rd European Symposium on the Reliability of Electron Devices, Failure Physics and Analysis (ESREF), Cagliari, Italy, October 1-5, 2012
Organisational unit
03380 - Huang, Qiuting (emeritus) / Huang, Qiuting (emeritus)  
More
Show all metadata
ETH Bibliography
yes
Altmetrics