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dc.contributor.author
Jäger, T.
dc.contributor.author
Bissig, B.
dc.contributor.author
Döbeli, M.
dc.contributor.author
Tiwari, A. N.
dc.contributor.author
Romanyuk, Y. E.
dc.date.accessioned
2017-06-19T15:53:24Z
dc.date.available
2017-06-19T15:53:24Z
dc.date.issued
2014-02
dc.identifier.issn
0040-6090
dc.identifier.issn
1879-2731
dc.identifier.other
10.1016/j.tsf.2013.12.038
dc.identifier.uri
http://hdl.handle.net/20.500.11850/164232
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Transparent conducting oxide
dc.subject
Fluorine doped tin oxide
dc.subject
Magnetron sputtering
dc.subject
Rapid thermal annealing
dc.subject
Low emissive coatings
dc.title
Thin films of SnO2:F by reactive magnetron sputtering with rapid thermal post-annealing
dc.type
Conference Paper
ethz.journal.title
Thin Solid Films
ethz.journal.volume
553
ethz.journal.abbreviated
Thin solid films (Print)
ethz.pages.start
21
ethz.pages.end
25
ethz.event
E-MRS Symposium O: “Synthesis, processing and characterization of nanoscale multifunctional oxide films — IV”
ethz.event.location
Strasbourg, France
ethz.event.date
May 27-31, 2013
ethz.notes
Available online 28 December 2013.
ethz.identifier.nebis
000056364
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02010 - Dep. Physik / Dep. of Physics::02532 - Institut für Teilchen- und Astrophysik / Inst. Particle Physics and Astrophysics::08619 - Labor für Ionenstrahlphysik (LIP)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02010 - Dep. Physik / Dep. of Physics::02532 - Institut für Teilchen- und Astrophysik / Inst. Particle Physics and Astrophysics::08619 - Labor für Ionenstrahlphysik (LIP)
ethz.date.deposited
2017-06-19T15:54:31Z
ethz.source
ECIT
ethz.identifier.importid
imp593652d2783c296343
ethz.ecitpid
pub:151199
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-08-02T13:37:16Z
ethz.rosetta.lastUpdated
2018-11-05T12:32:34Z
ethz.rosetta.versionExported
true
ethz.COinS
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