Multiscale simulation of aluminum thin films for the design of highly-reliable MEMS devices

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Author

Date

2009-09

Type

Conference Paper

ETH Bibliography

yes

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Publication status

published

External links

Journal / series

Microelectronics Reliability

Volume

49(9-11)

Pages / Article No.

1278 - 1282

Publisher

Elsevier

Event

20th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, Arcachon, France, October 5-9, 2009

Notes

Received 29 June 2009, Available online 8 August 2009.

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ETH Bibliography

yes

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