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dc.contributor.author
Kubo, Haruka
dc.contributor.author
Ciappa, Mauro
dc.contributor.author
Masunaga, Takayuki
dc.contributor.author
Fichtner, Wolfgang
dc.date.accessioned
2017-06-08T22:07:37Z
dc.date.available
2017-06-08T22:07:37Z
dc.date.issued
2009-09
dc.identifier.issn
0026-2714
dc.identifier.issn
1872-941X
dc.identifier.other
10.1016/j.microrel.2009.07.034
dc.identifier.uri
http://hdl.handle.net/20.500.11850/16424
dc.language.iso
en
dc.publisher
Elsevier
dc.title
Multiscale simulation of aluminum thin films for the design of highly-reliable MEMS devices
dc.type
Conference Paper
ethz.journal.title
Microelectronics Reliability
ethz.journal.volume
49
ethz.journal.issue
9-11
ethz.journal.abbreviated
Microelectron. reliab.
ethz.pages.start
1278
ethz.pages.end
1282
ethz.event
20th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis
ethz.event.location
Arcachon, France
ethz.event.date
October 5-9, 2009
ethz.notes
Received 29 June 2009, Available online 8 August 2009.
ethz.identifier.wos
ethz.identifier.nebis
001933457
ethz.publication.place
Kidlington, Oxford
ethz.publication.status
published
ethz.date.deposited
2017-06-08T22:08:01Z
ethz.source
ECIT
ethz.identifier.importid
imp59364c6484ac118634
ethz.ecitpid
pub:28299
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-13T00:50:54Z
ethz.rosetta.lastUpdated
2020-02-14T06:03:16Z
ethz.rosetta.versionExported
true
ethz.COinS
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