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dc.contributor.author
Kurzawski, P.
dc.contributor.author
Salo, T.
dc.contributor.author
Hierlemann, Andreas
dc.date.accessioned
2017-06-19T16:02:32Z
dc.date.available
2017-06-19T16:02:32Z
dc.date.issued
2005
dc.identifier.isbn
0-7803-8732-5
dc.identifier.other
10.1109/JMEMS.2006.878883
dc.identifier.uri
http://hdl.handle.net/20.500.11850/164473
dc.language.iso
en
dc.publisher
IEEE
dc.title
Towards a versatile DRIE: silicon pit structures combined with electrochemical etch stop
dc.type
Conference Paper
ethz.book.title
18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005
ethz.pages.start
504
ethz.pages.end
507
ethz.event
18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2005)
ethz.event.location
Miami Beach, FL, USA
ethz.event.date
January 30 - February 3, 2005
ethz.notes
.
ethz.identifier.nebis
004997816
ethz.publication.place
Piscataway, N.J.
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02060 - Dep. Biosysteme / Dep. of Biosystems Science and Eng.::03684 - Hierlemann, Andreas / Hierlemann, Andreas
ethz.date.deposited
2017-06-19T16:02:58Z
ethz.source
ECIT
ethz.identifier.importid
imp59365419a11ce49663
ethz.ecitpid
pub:174350
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-08-01T18:18:19Z
ethz.rosetta.lastUpdated
2018-11-05T12:37:14Z
ethz.rosetta.versionExported
true
ethz.COinS
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