Film formation from HMDSO: Comparison of direct plasma injection with afterglow injection using an atmospheric pressure dielectric barrier discharge - Research Collection

Metadata only

Author

Wallimann, Roger

Oberbossel, Gina

Butscher, Denis

Rudolf von Rohr, Philipp

Date

2017-08

Type

Conference Paper

Citations

Cited 1 times in Web of Science

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1051/epjap/2017160478

Journal / series

The European Physical Journal. Applied Physics

Volume

79(2)

Pages / Article No.

20801

Publisher

EDP Sciences

Event

15th International Symposium on High Pressure Low Temperature Plasma Chemistry (HAKONE XV), Brno, Czech Republic, September 11-16, 2016

Organisational unit

03348 - Rudolf von Rohr, Philipp

Related publications and datasets

Is variant form of: http://hdl.handle.net/20.500.11850/122036

Is variant form of: http://hdl.handle.net/20.500.11850/122036

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Citations

Cited 1 times in Web of Science

ETH Bibliography

yes

Altmetrics