Film formation from HMDSO: Comparison of direct plasma injection with afterglow injection using an atmospheric pressure dielectric barrier discharge
Metadata only
Date
2017-08Type
- Conference Paper
Publication status
publishedExternal links
Journal / series
The European Physical Journal. Applied PhysicsVolume
Pages / Article No.
Publisher
EDP SciencesEvent
Organisational unit
03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
Related publications and datasets
Is variant form of: http://hdl.handle.net/20.500.11850/122036
Is variant form of: http://hdl.handle.net/20.500.11850/122036
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