Film formation from HMDSO: Comparison of direct plasma injection with afterglow injection using an atmospheric pressure dielectric barrier discharge

Thumbnail
Metadata only
Author
Wallimann, Roger
Oberbossel, Gina
Butscher, Denis
Rudolf von Rohr, Philipp
Show all
Date
2017-08
Type
  • Conference Paper
Publication status
published
External links
Search via SFX
Journal / series
The European Physical Journal. Applied Physics
Volume
79(2)
Pages
20801
Publisher
EDP Sciences
Event
15th International Symposium on High Pressure Low Temperature Plasma Chemistry (HAKONE XV), Brno, Czech Republic, September 11-16, 2016
Organisational unit
03348 - Rudolf von Rohr, Philipp
Related publications and datasets
More
Show all metadata
Citations
Cited 0 times in Web of Science
Altmetrics