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dc.contributor.author
Wegner, K.
dc.contributor.author
Piseri, P.
dc.contributor.author
Tafreshi, Vahedi H.
dc.contributor.author
Milani, P.
dc.date.accessioned
2017-06-08T15:37:59Z
dc.date.available
2017-06-08T15:37:59Z
dc.date.issued
2006-11
dc.identifier.issn
0022-3727
dc.identifier.issn
1361-6463
dc.identifier.other
10.1088/0022-3727/39/22/R02
dc.identifier.uri
http://hdl.handle.net/20.500.11850/1777
dc.language.iso
en
dc.publisher
Institute of Physics
dc.title
Cluster beam deposition
dc.type
Review Article
ethz.title.subtitle
A tool for nanoscale science and technology
ethz.journal.title
Journal of Physics D
ethz.journal.volume
39
ethz.journal.issue
22
ethz.journal.abbreviated
J. Phys. D: Appl. Phys.
ethz.pages.start
R439
ethz.pages.end
R459
ethz.notes
Received 21 June 2006, In final form 7 August 2006, Published 3 November 2006.
ethz.identifier.wos
ethz.identifier.nebis
000025112
ethz.publication.place
Bristol
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik / Institute of Process Engineering::03510 - Pratsinis, Sotiris E. / Pratsinis, Sotiris E.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik / Institute of Process Engineering::03510 - Pratsinis, Sotiris E. / Pratsinis, Sotiris E.
ethz.date.deposited
2017-06-08T15:38:24Z
ethz.source
ECIT
ethz.identifier.importid
imp59364b45797b087099
ethz.ecitpid
pub:11636
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-17T09:29:43Z
ethz.rosetta.lastUpdated
2020-02-14T04:12:35Z
ethz.rosetta.versionExported
true
ethz.COinS
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