Show simple item record

dc.contributor.author
Bieder, Andrea
dc.contributor.author
Sonnenfeld, Axel
dc.contributor.author
Rudolf von Rohr, Philipp
dc.date.accessioned
2017-06-08T15:40:01Z
dc.date.available
2017-06-08T15:40:01Z
dc.date.issued
2006
dc.identifier.issn
0040-6090
dc.identifier.issn
1879-2731
dc.identifier.other
10.1016/j.tsf.2006.08.006
dc.identifier.uri
http://hdl.handle.net/20.500.11850/1931
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Plasma enhanced chemical vapor deposition (PECVD)
dc.subject
3D
dc.subject
Conductive substrates
dc.subject
Dielectric substrates
dc.subject
Ellipsometry
dc.subject
Fourier transform infrared spectroscopy (FTIR)
dc.title
Uniformity and composition of silicon oxide films on 3D geometries by plasma enhanced chemical vapor deposition
dc.type
Journal Article
ethz.journal.title
Thin Solid Films
ethz.journal.volume
515
ethz.journal.issue
4
ethz.journal.abbreviated
Thin solid films (Print)
ethz.pages.start
2807
ethz.pages.end
2813
ethz.notes
Received 22 November 2005, Revised 19 July 2006, Accepted 6 August 2006, Available online 20 September 2006.
ethz.identifier.wos
ethz.identifier.nebis
000056364
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik / Institute of Process Engineering::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik / Institute of Process Engineering::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.date.deposited
2017-06-08T15:40:13Z
ethz.source
ECIT
ethz.identifier.importid
imp59364b489d90f50139
ethz.ecitpid
pub:11795
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T23:18:22Z
ethz.rosetta.lastUpdated
2019-02-02T04:06:47Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Uniformity%20and%20composition%20of%20silicon%20oxide%20films%20on%203D%20geometries%20by%20plasma%20enhanced%20chemical%20vapor%20deposition&rft.jtitle=Thin%20Solid%20Films&rft.date=2006&rft.volume=515&rft.issue=4&rft.spage=2807&rft.epage=2813&rft.issn=0040-6090&1879-2731&rft.au=Bieder,%20Andrea&Sonnenfeld,%20Axel&Rudolf%20von%20Rohr,%20Philipp&rft.genre=article&
 Search via SFX

Files in this item

FilesSizeFormatOpen in viewer

There are no files associated with this item.

Publication type

Show simple item record