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dc.contributor.author
Borer, Beat
dc.contributor.author
Sonnenfeld, Axel
dc.contributor.author
Rudolf von Rohr, Philipp
dc.date.accessioned
2017-06-08T15:40:02Z
dc.date.available
2017-06-08T15:40:02Z
dc.date.issued
2006
dc.identifier.issn
0257-8972
dc.identifier.issn
1879-3347
dc.identifier.other
10.1016/j.surfcoat.2006.03.001
dc.identifier.uri
http://hdl.handle.net/20.500.11850/1933
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
PECVD
dc.subject
Circulating fluidized bed
dc.subject
Particulate substrate
dc.subject
Coating
dc.subject
Structure zone model
dc.subject
Nodular defect
dc.subject
Shadowing effect
dc.title
Influence of substrate temperature on morphology of SiOx films deposited on particles by PECVD
dc.type
Journal Article
ethz.journal.title
Surface & coatings technology
ethz.journal.volume
201
ethz.journal.issue
3-4
ethz.journal.abbreviated
Surf. coat. technol.
ethz.pages.start
1757
ethz.pages.end
1762
ethz.notes
Received 1 April 2005, Accepted 2 March 2006, Available online 12 July 2006.
ethz.identifier.wos
ethz.identifier.scopus
ethz.identifier.nebis
000035352
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik / Institute of Process Engineering::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik / Institute of Process Engineering::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.date.deposited
2017-06-08T15:40:13Z
ethz.source
ECIT
ethz.identifier.importid
imp59364b48a88f762336
ethz.ecitpid
pub:11797
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T20:55:17Z
ethz.rosetta.lastUpdated
2019-02-02T04:06:50Z
ethz.rosetta.versionExported
true
ethz.COinS
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