Electrostatically actuated all-polymer microbeam resonators

Characterization and application
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Author
Schmid, Silvan
Date
2009
Type
  • Doctoral Thesis
Rights / license
In Copyright - Non-Commercial Use Permitted
Permanent link
https://doi.org/10.3929/ethz-a-005910629
Publication status
published
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Contributors
Supervisor: Hierold, Christofer
Supervisor: Hierlemann, Andreas
Journal / series
Scientific reports on micro and nanosystems
Volume
6
Publisher
Der andere Verlag
Subject
MIKROSYSTEMTECHNIK, MST; PLASTICS (MATERIALS); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); BIOSENSORS (BIOTECHNOLOGY); MICRO SYSTEM TECHNOLOGIES, MST; KUNSTSTOFFE (WERKSTOFFE); BIOSENSOREN (BIOTECHNOLOGIE); RESONATORS/ELECTRICAL OSCILLATION TECHNOLOGY; RESONATOREN/ELEKTRISCHE SCHWINGUNGSTECHNIK; MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK)
Organisational unit
03609 - Hierold, Christofer
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