Electrostatically actuated all-polymer microbeam resonators
Characterization and application
Open access
Date
2009Type
- Doctoral Thesis
ETH Bibliography
yes
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Permanent link
https://doi.org/10.3929/ethz-a-005910629Publication status
publishedExternal links
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Contributors
Examiner: Hierold, ChristoferExaminer: Hierlemann, Andreas
Journal / series
Scientific reports on micro and nanosystemsVolume
Publisher
Der andere VerlagSubject
MIKROSYSTEMTECHNIK, MST; PLASTICS (MATERIALS); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); BIOSENSORS (BIOTECHNOLOGY); MICRO SYSTEM TECHNOLOGIES, MST; KUNSTSTOFFE (WERKSTOFFE); BIOSENSOREN (BIOTECHNOLOGIE); RESONATORS/ELECTRICAL OSCILLATION TECHNOLOGY; RESONATOREN/ELEKTRISCHE SCHWINGUNGSTECHNIK; MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK)Organisational unit
03609 - Hierold, Christofer / Hierold, Christofer
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ETH Bibliography
yes
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