Analysis of the propagation losses of InP/InGaAsP trench waveguides fabricated by focused ion beam
- Journal Article
Journal / seriesMicroelectronic Engineering
Pages / Article No.
SubjectFocused ion beam; Microstructuring; Sputtering; Gas-assisted etching; InP; Multimode trench waveguides; Propagation losses
NotesReceived 7 September 2009, Revised 30 November 2009, Accepted 21 December 2009, Available online 6 January 2010.
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