Analysis of the propagation losses of InP/InGaAsP trench waveguides fabricated by focused ion beam
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Date
2010Type
- Journal Article
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
Microelectronic EngineeringVolume
Pages / Article No.
Publisher
ElsevierSubject
Focused ion beam; Microstructuring; Sputtering; Gas-assisted etching; InP; Multimode trench waveguides; Propagation lossesNotes
Received 7 September 2009, Revised 30 November 2009, Accepted 21 December 2009, Available online 6 January 2010.More
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ETH Bibliography
yes
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