Nano electro mechanical systems with single walled carbon nanotubes as functional elements
dc.contributor.author
Hierold, Christofer
dc.contributor.author
Stampfer, Christoph
dc.contributor.author
Helbling, Thomas
dc.contributor.author
Jungen, Alain
dc.contributor.author
Sarangi, Debajyoti
dc.date.accessioned
2021-07-29T07:55:41Z
dc.date.available
2017-06-09T05:26:01Z
dc.date.available
2018-09-12T10:48:34Z
dc.date.available
2021-07-29T07:55:41Z
dc.date.issued
2006
dc.identifier.issn
1474-6670
dc.identifier.other
10.3182/20060912-3-DE-2911.00020
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/22428
dc.description.abstract
Sensors are key components in mechatronic systems. Further system miniaturization will demand for continuous down-scaling of sensor functions in such systems most likely towards nano scale. Then new sensor device concepts will emerge to maintain performance, e.g. sensitivity, or to utilize unique functional properties of nano scale structures. This paper presents concepts to create nano electro mechanical sensors based on carbon nanotubes (CNTs). Suspended single walled CNT based cantilever and bridge structures and a membrane based CNT pressure sensor are introduced and discussed. Measurements on the pressure sensor prove metallic single walled CNTs as exceptional piezoresistive electro mechanical transducers with gauge factors above 200.
en_US
dc.language.iso
en
en_US
dc.publisher
Elsevier
en_US
dc.subject
Nano electro mechanical systems
en_US
dc.subject
NEMS
en_US
dc.subject
Carbon nanotubes
en_US
dc.subject
Sensors
en_US
dc.subject
Pressure sensor
en_US
dc.title
Nano electro mechanical systems with single walled carbon nanotubes as functional elements
en_US
dc.type
Conference Paper
dc.date.published
2016-04-23
ethz.book.title
4th IFAC Symposium on Mechatronic Systems
en_US
ethz.journal.title
IFAC Proceedings Volumes
ethz.journal.volume
39
en_US
ethz.journal.issue
16
en_US
ethz.pages.start
97
en_US
ethz.pages.end
101
en_US
ethz.event
4th IFAC Symposium on Mechatronic Systems (MX 2006)
en_US
ethz.event.location
Heidelberg, Germany
en_US
ethz.event.date
September 12-14, 2006
en_US
ethz.publication.place
Oxford
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
en_US
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03609 - Hierold, Christofer / Hierold, Christofer
ethz.date.deposited
2017-06-09T05:26:05Z
ethz.source
ECIT
ethz.identifier.importid
imp59364cffc604682939
ethz.ecitpid
pub:37292
ethz.eth
yes
en_US
ethz.availability
Metadata only
en_US
ethz.rosetta.installDate
2017-07-12T20:57:27Z
ethz.rosetta.lastUpdated
2022-03-29T10:48:07Z
ethz.rosetta.versionExported
true
ethz.COinS
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