Fabrication and characterization of freestanding Si/Cr micro- and nanospirals

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Author
Zhang, Li
Dong, Lixin
Bell, Dominik J.
Nelson, Bradley J.
Schönenberger, Christian
Grützmacher, Detlev
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Date
2006-04
Type
  • Conference Paper
Publication status
published
External links
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Journal / series
Microelectronic Engineering
Volume
83(4-9)
Pages / Article No.
1237 - 1240
Publisher
Elsevier
Event
Micro- and Nano-Engineering (MNE 2005), Vienna, Austria, September 19-22, 2005
Subject
Spiral nanobelts; Coiling up; Nano- manipulation; Shape-memory
Organisational unit
03627 - Nelson, Bradley J.  
Notes
Available online 20 February 2006.
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Citations
Cited 27 times in Web of Science
ETH Bibliography
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