Hybrid Nanorobotic Approaches for Fabricating NEMS from 3D Helical Nanostructures

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Author
Dong, Lixin
Zhang, Li
Bell, Dominik J.
Nelson, Bradley J.
Grützmacher, Detlev
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Date
2006
Type
    Conference Paper
Abstract
Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from SiGe/Si/Cr nanocoi Show more
Publication status
published
External links
Book title
2006 IEEE International Conference on Robotics and Automation
Pages / Article No.
1396 - 1401
Publisher
IEEE
Event
IEEE International Conference on Robotics and Automation (ICRA 2006), Orlando, FL, USA, May 15-19, 2006
Subject
Nanorobotics; Nanomanipulation; Nanoassembly; NEMS; 3D helical nanostructures
Organisational unit
03627 - Nelson, Bradley J. / Nelson, Bradley J.  
Notes
Date of current version 26 June 2006.
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