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dc.contributor.author
Zhang, Li
dc.contributor.author
Deckardt, E.
dc.contributor.author
Weber, A.
dc.contributor.author
Schönenberger, Christian
dc.contributor.author
Grützmacher, Detlev
dc.date.accessioned
2017-06-09T05:35:30Z
dc.date.available
2017-06-09T05:35:30Z
dc.date.issued
2006
dc.identifier.issn
0167-9317
dc.identifier.issn
1873-5568
dc.identifier.other
10.1016/j.mee.2006.01.128
dc.identifier.uri
http://hdl.handle.net/20.500.11850/22912
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Anisotropic underetching
dc.subject
Micro-tube
dc.subject
Scrolling
dc.subject
Si(110)
dc.subject
Si(111)
dc.title
Directional scrolling of hetero-films on Si(110) and Si(111) surfaces
dc.type
Journal Article
ethz.journal.title
Microelectronic Engineering
ethz.journal.volume
83
ethz.journal.issue
4-9
ethz.journal.abbreviated
Microelectron. eng.
ethz.pages.start
1233
ethz.pages.end
1236
ethz.notes
.
ethz.identifier.nebis
000022878
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02620 - Inst. f. Robotik u. Intelligente Systeme / Inst. Robotics and Intelligent Systems::03627 - Nelson, Bradley J. / Nelson, Bradley J.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02620 - Inst. f. Robotik u. Intelligente Systeme / Inst. Robotics and Intelligent Systems::03627 - Nelson, Bradley J. / Nelson, Bradley J.
ethz.date.deposited
2017-06-09T05:35:38Z
ethz.source
ECIT
ethz.identifier.importid
imp59364d08ab73632249
ethz.ecitpid
pub:37785
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-18T07:30:21Z
ethz.rosetta.lastUpdated
2018-10-01T09:06:18Z
ethz.rosetta.versionExported
true
ethz.COinS
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