High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
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Date
2017-05-25Type
- Journal Article
Publication status
publishedJournal / series
Microelectronic EngineeringVolume
Pages
Publisher
ElsevierSubject
Hot embossing; Nanoimprint; Microcasting; Metal gratings; Au80Sn20 eutectic alloy; High aspect ratio gratings; X-ray opticsOrganisational unit
03817 - Stampanoni, Marco F.M.
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