High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
Metadata only
Author
Romano, Lucia
Vila-Comamala, Joan
Kagias, Matias
Vogelsang, Konrad
Schift, Helmut
Stampanoni, Marco F. M.
Jefimovs, Konstantins
Date
2017-05-25Type
- Journal Article
Publication status
publishedJournal / series
Microelectronic EngineeringVolume
Pages
Publisher
ElsevierSubject
Hot embossing; Nanoimprint; Microcasting; Metal gratings; Au80Sn20 eutectic alloy; High aspect ratio gratings; X-ray opticsOrganisational unit
03817 - Stampanoni, Marco F.M.
More
Show all metadata