High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication

Romano, Lucia; Vila-Comamala, Joan; Kagias, Matias; Vogelsang, Konrad; Schift, Helmut; Stampanoni, Marco; Jefimovs, Konstantins

doi:10.1016/j.mee.2016.12.032

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Author

Romano, Lucia

Vila-Comamala, Joan

Kagias, Matias

Vogelsang, Konrad

Schift, Helmut

Stampanoni, Marco

Jefimovs, Konstantins

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Date

2017-05-25

Type

Journal Article

Citations

Cited 10 times in Web of Science

Cited 2 times in Scopus

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1016/j.mee.2016.12.032

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Journal / series

Microelectronic Engineering

Volume

176

Pages / Article No.

6 - 10

Publisher

Elsevier

Subject

Hot embossing; Nanoimprint; Microcasting; Metal gratings; Au80Sn20 eutectic alloy; High aspect ratio gratings; X-ray optics

Organisational unit

03817 - Stampanoni, Marco F.M. / Stampanoni, Marco F.M.

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Show all metadata

Citations

Cited 10 times in Web of Science

Cited 2 times in Scopus

ETH Bibliography

yes

Altmetrics

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High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication

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