Accurate extraction of the mechanical properties of thin films by nanoindentation for the design of reliable MEMS
- Journal Article
Journal / seriesMicroelectronics Reliability
Pages / Article No.
Organisational unit03228 - Fichtner, Wolfgang
03380 - Huang, Qiuting / Huang, Qiuting
NotesReceived 5 July 2010, Accepted 19 July 2010, Available online 21 August 2010.
MoreShow all metadata