Fracture of Silicon: Influence of rate, positioning accuracy, FIB machining, and elevated temperatures on toughness measured by pillar indentation splitting
Metadata only
Datum
2018-03-15Typ
- Journal Article
Publikationsstatus
publishedExterne Links
Zeitschrift / Serie
Materials & DesignBand
Seiten / Artikelnummer
Verlag
ElsevierThema
Silicon; Fracture mechanisms; Temperature dependence; Pillar indentation; Focused ion beam damageOrganisationseinheit
03692 - Spolenak, Ralph / Spolenak, Ralph
Förderung
166094 - DiaMicro - Using Nanomechanics to Understand Plasticity in Diamond-structured Crystals (SNF)