Fracture of Silicon: Influence of rate, positioning accuracy, FIB machining, and elevated temperatures on toughness measured by pillar indentation splitting
dc.contributor.author
Lauener, Carmen M.
dc.contributor.author
Pethö, Laszlo
dc.contributor.author
Chen, Ming
dc.contributor.author
Xiao, Yuan
dc.contributor.author
Michler, Johannes
dc.contributor.author
Wheeler, Jeffrey M.
dc.date.accessioned
2018-04-25T13:19:07Z
dc.date.available
2018-02-15T04:22:45Z
dc.date.available
2018-04-05T16:05:02Z
dc.date.available
2018-04-25T13:19:07Z
dc.date.issued
2018-03-15
dc.identifier.issn
0264-1275
dc.identifier.issn
1873-4197
dc.identifier.other
10.1016/j.matdes.2018.01.015
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/240908
dc.language.iso
en
en_US
dc.publisher
Elsevier
en_US
dc.subject
Silicon
en_US
dc.subject
Fracture mechanisms
en_US
dc.subject
Temperature dependence
en_US
dc.subject
Pillar indentation
en_US
dc.subject
Focused ion beam damage
en_US
dc.title
Fracture of Silicon: Influence of rate, positioning accuracy, FIB machining, and elevated temperatures on toughness measured by pillar indentation splitting
en_US
dc.type
Journal Article
dc.date.published
2018-01-11
ethz.journal.title
Materials & Design
ethz.journal.volume
142
en_US
ethz.journal.abbreviated
Mater. des.
ethz.pages.start
340
en_US
ethz.pages.end
349
en_US
ethz.grant
DiaMicro - Using Nanomechanics to Understand Plasticity in Diamond-structured Crystals
en_US
ethz.identifier.wos
ethz.identifier.scopus
ethz.publication.place
Amsterdam
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02160 - Dep. Materialwissenschaft / Dep. of Materials::02645 - Institut für Metallforschung / Institute of Metals Research::03692 - Spolenak, Ralph / Spolenak, Ralph
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02160 - Dep. Materialwissenschaft / Dep. of Materials::02645 - Institut für Metallforschung / Institute of Metals Research::03692 - Spolenak, Ralph / Spolenak, Ralph
ethz.grant.agreementno
166094
ethz.grant.fundername
SNF
ethz.grant.funderDoi
10.13039/501100001711
ethz.grant.program
Projekte MINT
ethz.date.deposited
2018-02-15T04:22:51Z
ethz.source
SCOPUS
ethz.eth
yes
en_US
ethz.availability
Metadata only
en_US
ethz.rosetta.installDate
2018-04-25T13:19:12Z
ethz.rosetta.lastUpdated
2022-03-28T19:49:50Z
ethz.rosetta.versionExported
true
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