Investigation of the local Ge concentration in Si/SiGe nanostructures by convergent-beam electron diffraction

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Author
Ruh, E.
Mueller, E.
Mussler, G.
Sigg, H. C.
Gruetzmacher, D.
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Date
2010
Type
  • Journal Article
Publication status
published
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Journal / series
Ultramicroscopy
Volume
110(10)
Pages
1255 - 1266
Publisher
Elsevier
Subject
CBED; SiGe; Multi quantum well; HOLZ line; Thin foil relaxation; Local concentration
Notes
Received 20 September 2009, Revised 7 May 2010, Accepted 11 May 2010, Available online 16 May 2010.
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Citations
Cited 4 times in Web of Science
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