Investigation of the local Ge concentration in Si/SiGe nanostructures by convergent-beam electron diffraction
Metadata only
Date
2010Type
- Journal Article
Publication status
publishedExternal links
Journal / series
UltramicroscopyVolume
Pages / Article No.
Publisher
ElsevierSubject
CBED; SiGe; Multi quantum well; HOLZ line; Thin foil relaxation; Local concentrationNotes
Received 20 September 2009, Revised 7 May 2010, Accepted 11 May 2010, Available online 16 May 2010.More
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