Investigation of the local Ge concentration in Si/SiGe nanostructures by convergent-beam electron diffraction
Metadata only
Datum
2010Typ
- Journal Article
Publikationsstatus
publishedExterne Links
Zeitschrift / Serie
UltramicroscopyBand
Seiten / Artikelnummer
Verlag
ElsevierThema
CBED; SiGe; Multi quantum well; HOLZ line; Thin foil relaxation; Local concentrationAnmerkungen
Received 20 September 2009, Revised 7 May 2010, Accepted 11 May 2010, Available online 16 May 2010.