Monolithically Integrated Two-Axis Microtensile Tester for the Mechanical Characterization of Microscopic Samples
- Journal Article
Journal / seriesJournal of Microelectromechanical Systems
Pages / Article No.
SubjectCalibration; Capacitive microforce and position sensing; Electrostatic actuation; Uncertainty analysis
Organisational unit03627 - Nelson, Bradley J. / Nelson, Bradley J.
NotesReceived May 14 2010, Revised July 19 2010, Accepted July 23 2010, Published September 9 2010.
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