Monolithically Integrated Two-Axis Microtensile Tester for the Mechanical Characterization of Microscopic Samples
Metadata only
Date
2010Type
- Journal Article
Publication status
publishedExternal links
Journal / series
Journal of Microelectromechanical SystemsVolume
Pages / Article No.
Publisher
IEEESubject
Calibration; Capacitive microforce and position sensing; Electrostatic actuation; Uncertainty analysisOrganisational unit
03627 - Nelson, Bradley J. / Nelson, Bradley J.
Notes
Received May 14 2010, Revised July 19 2010, Accepted July 23 2010, Published September 9 2010.More
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