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dc.contributor.author
Muntwyler, Simon
dc.contributor.author
Kratochvil, Bradley E.
dc.contributor.author
Beyeler, Felix
dc.contributor.author
Nelson, Bradley J.
dc.date.accessioned
2017-06-09T06:18:16Z
dc.date.available
2017-06-09T06:18:16Z
dc.date.issued
2010
dc.identifier.issn
1057-7157
dc.identifier.issn
1941-0158
dc.identifier.other
10.1109/JMEMS.2010.2067443
dc.identifier.uri
http://hdl.handle.net/20.500.11850/24411
dc.language.iso
en
dc.publisher
IEEE
dc.subject
Calibration
dc.subject
Capacitive microforce and position sensing
dc.subject
Electrostatic actuation
dc.subject
Uncertainty analysis
dc.title
Monolithically Integrated Two-Axis Microtensile Tester for the Mechanical Characterization of Microscopic Samples
dc.type
Journal Article
ethz.journal.title
Journal of Microelectromechanical Systems
ethz.journal.volume
19
ethz.journal.issue
5
ethz.pages.start
1223
ethz.pages.end
1233
ethz.notes
Received May 14 2010, Revised July 19 2010, Accepted July 23 2010, Published September 9 2010.
ethz.identifier.wos
ethz.identifier.nebis
000643917
ethz.publication.place
New York
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02620 - Inst. f. Robotik u. Intelligente Systeme / Inst. Robotics and Intelligent Systems::03627 - Nelson, Bradley J. / Nelson, Bradley J.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02620 - Inst. f. Robotik u. Intelligente Systeme / Inst. Robotics and Intelligent Systems::03627 - Nelson, Bradley J. / Nelson, Bradley J.
ethz.date.deposited
2017-06-09T06:18:47Z
ethz.source
ECIT
ethz.identifier.importid
imp59364d25d602d67399
ethz.ecitpid
pub:39819
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T11:41:10Z
ethz.rosetta.lastUpdated
2022-03-28T09:00:08Z
ethz.rosetta.versionExported
true
ethz.COinS
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