Beyond 100 nm resolution in 3D laser lithography — Post processing solutions - Research Collection

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Author

Šeniutinas, Gediminas

Padeste, Celestino

Sakellari, Ioanna

David, Christian

Date

2018-05-05

Type

Journal Article

Citations

Cited 94 times in Scopus

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1016/j.mee.2018.01.018

Journal / series

Microelectronic Engineering

Volume

191

Pages / Article No.

25 - 31

Publisher

Elsevier

Subject

3D laser lithography; Laser polymerization; Pyrolysis; Plasma etching

Organisational unit

03997 - Heyderman, Laura / Heyderman, Laura

More

Show all metadata

Citations

Cited 94 times in Scopus

ETH Bibliography

yes

Altmetrics