Benchmarking of Monolithic 3D Integrated MX2 FETs with Si FinFETs

Metadata only

Author

Agarwal, Tarun K.

Szabo, Aron

Garcia Bardon, Marie

Sorée, Bart

Radu, Iuliana

Raghavan, Praveen

Luisier, Mathieu

Dehaene, Wim

Heyns, Marc

Date

2017

Type

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Publication status

published

External links

Book title

2017 IEEE International Electron Devices Meeting (IEDM)

Pages

5.7.1 - 5.7.4

Publisher

IEEE

Event

2017 IEEE International Electron Devices Meeting (IEDM), San Francisco, CA, USA, December 2-6, 2017

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