Direct wiring of carbon nanotubes for integration in nanoelectromechanical systems
- Conference Paper
Journal / seriesJournal of vacuum science & technology : an international journal devoted to microelectronics and nanometer structures : processing, measurement, and phenomena. Series 2. B
Pages / Article No.
PublisherAmerican Institute of Physics
Organisational unit03609 - Hierold, Christofer
NotesReceived 31 May 2006, Accepted 9 October 2006, Published 4 December 2006.
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