Direct wiring of carbon nanotubes for integration in nanoelectromechanical systems
- Conference Paper
Journal / seriesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Pages / Article No.
PublisherAmerican Institute of Physics
Organisational unit03609 - Hierold, Christofer / Hierold, Christofer
NotesReceived 31 May 2006, Accepted 9 October 2006, Published 4 December 2006.
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