Direct wiring of carbon nanotubes for integration in nanoelectromechanical systems - Research Collection

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Autor(in)

Datum

2006

Typ

Conference Paper

Zitate

25 Zitate in Web of Science

ETH Bibliographie

yes

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Publikationsstatus

published

Externe Links

https://doi.org/10.1116/1.2388965

Zeitschrift / Serie

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

Band

24(6)

Seiten / Artikelnummer

3144 - 3147

Verlag

American Institute of Physics

Konferenz

50th International Conference on Electron, Ion, and Photon Beam Technology and Nanofavrication, Baltimore, MD, USA, May 30 - June 2, 2006

Organisationseinheit

03609 - Hierold, Christofer / Hierold, Christofer

Anmerkungen

Received 31 May 2006, Accepted 9 October 2006, Published 4 December 2006.

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Zitate

25 Zitate in Web of Science

ETH Bibliographie

yes

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